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PVD and CVD Coating Thickness Gauge : XDV-SDD

Material Analysis Instrument : XDV-SDD

The high-end measurement system Fischerscope X-Ray XAN SDD was developed specifically for non destructive, high precision analysis of thin gold and precious metal coatings. Gold testing machine in hallmarking centres: XDV-SDD is engineered under the firm direction of expert quality controllers. These are basically X-ray fluorescence measuring instrument with a programmable XY-stage and Z-Axis for Automated Measurements of very thin coatings and for trace analysis. These are extensively used as an energy-dispersive X-ray fluorescence measuring instrument for the measurement and analysis of very thin coatings or small concentrations in the trace analysis.

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PVD and CVD Coating Thickness Gauge : XDV-SDD

These are universally applicable energy-dispersive X-ray fluorescence measuring instrument widely used for measuring and analyzing very thin coatings or small concentrations in the trace analysis.

These have programmable XY-stage, which make these perfect for auto-mated sample measurements.

These are featured with electrically changeable apertures and primary filters and modern silicon drift detector to ensure high accuracy, good detection sensitivity, long term stability and outstanding accuracy.

These are widely recommended by clients owing to its precise design, robust design, longer service life and effective usage.

These are user-friendly bench-top instrument equipped with programmable XY-stage and an electrically driven Z-axis for automatic measurement.

These are also fitted with a laser pointer, integrated video-microscope with zoom, protective hood and cross-Hairs simplifies sample placement for perfect measurement.

These are operated using the powerful and user-friendly WinFTM® software, for entire operation and evaluation of measurements as well as the clear presentation of measurement data is performed on a PC.

Typical areas of application are:

Analysis of very thin coatings, e.g. gold/palladium coatings of ≤ 0.1 μm

Trace analysis on pc boards according to ROHS and WEEE requirements

Gold analysis

Measurement of functional coatings in the electronics and semiconductor industries

Determination of complex multi-coating systems

Automated measurements, e.g., in quality control

General Specification

Intended use:Energy dispersive X-ray fluorescence measuring instrument (EDXRF)

to determine thin coatings and alloys

Element range:Aluminum Al (13) to Uranium U (92) – up to 24 elements simultaneously

Design:Bench-top unit with hood opening upwards XY-stage and Z-axis

electrically driven and programmable,Motor-driven changeable apertures

and filters Video camera and laser pointer (class 1) for orienting the sample

Measuring direction:From top to bottom

X-Ray Source

X-ray tubeMicro focus tungsten tube with beryllium window

High voltageThree steps 10 kV, 30 kV, 50 kV

Aperture (Collimator):4x changeable: Ø 0.2 mm (7.9 mils), Ø 0,6 mm (23.6 mils), Ø 1 mm

(39.4 mils),Ø 3 mm (118 mils), others on request

Primary filter:6x changeable (Ni, free, Al 1000 μm (39.4 mils), Al 500 μm (19.7 mils),

Al 100 μm (3.9 mils), Mylar® 100 μm (3.9 mils)

Measurement spot size:Depending on measurement distance and aperture,Measurement spot

size ≈ aperture size + 10% The actual measurement spot size is shown in the

video image.Smallest measurement spot: approx. Ø 0.25 mm (9.8 mils)

X-Ray Detection

X-ray detectorSilicon Drift Detector (SDD), peltier-cooled

Resolution (fwhm for Mn-Kα)≤ 140 eV

Measurement distance:0 … 80 mm (0 … 3.1 in) Distance compensation with patented DCM method

for simplified measurements at varying distances. For particular applications

or for higher demands on accuracy an additional calibration might be


Sample Alignment

Video microscopeHigh-resolution CCD color camera for optical monitoring of the measurement

location along the primary beam axis,manual focusing and auto-focus,

crosshairs with a calibrated scale (ruler) and spot-indicator,adjustable LED

illumination, laser pointer (class 1) to support accurate sample placement.

Zoom factorDigital 1x, 2x, 3x, 4x

FocusingAuto-focus and manually controlled motor focus.

Manual adjustment of the focal plane in a range from 0 to 80 mm.

Sample Stage

DesignFast, programmable XY-stage with pop-out function

Maximum travelX/Y-axis: 250 mm x 250 mm (9.8 x 9.8 in); Z-axis: 140 mm (5.5 in)

Max. travel speed 60 mm/s (0.2 ft/s)

Repeatability precision XY unidirectional: ≤ 5 μm (0.2 mils) max., ≤ 2 μm (0.08 mils) typ.

Usable sample placement area370 x 320 mm (14.6 x 12.6 in)

Max. sample weight5 kg (11 lb), with reduced approach travel precision 20 kg (44 lb)

Max. sample height 140 mm (5.5 in)

Electrical Data

Power supplyAC 115 V or AC 230 V 50 / 60 Hz

Power consumptionMax. 120 W ,without evaluation PC

Protection classIP40


External dimensions
Width x depth x height [mm]:
660 x 835 x 720 mm, [in]: 26 x 32.9 x 28.3

Interior dimensions580 x 560 x 145 mm, [in]: 22.8 x 22 x 5.7

Width x depth x height [mm]:
measurement chamber

WeightApprox. 140 kg (308 lb)

Environmental Conditions

Temperature: Operation10 °C – 40 °C / 50 °F – 104 °F

Temperature:0 °C – 50 °C / 32 °F – 122 °F


Admissible air humidity≤ 95 %, non-condensing

Evaluation Unit


SoftwareStandard: Fischer WinFTM® BASIC including PDM®,

Optional: Fischer WinFTM® SUPER


CE approvalEN 61010

X-Ray standardsDIN ISO 3497 and ASTM B 568

ApprovalFully protected instrument with type approval according to the German

regulations "Deutsche Röntgenverordnung-RöV".

Product Details:

Power consumptionMax. 120 W,without evaluation PC
Protection classIP40
WeightApprox. 140 kg (308 lb)
Temperature0 to 50 Deg C / 32 to 122 Deg F
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