Wafer coating thickness instrument - XUV 773 is one of the most preferred selections of clients owing to its precise design and outstanding accuracy. These are high performance X-ray fluorescence measuring instrument with vacuum chamber for non-destructive coating thickness measurement and material analysis. Engineered in accordance with international industrial standard, these devices are widely used for non-destructive analysis of thin coatings, traces and light elements. Up to 24 elements in the range of sodium (11) to uranium (92) can be determined simultaneously. Ergonomically designed these devices also provide facility for the measurement that it can be performed in vacuum, in ambient air or with helium purge (optional). Therefore also organic or wet samples can be analyzed.
Analysis of very thin coatings of ≤ 0.1 μm (0.004 mils)
Measurements of functional coatings in the electronics and semiconductor industries
Determination of complex multi-coating systems
Automated measurements, e.g., in quality control
Determination of the lead content in solder
Intended use:Energy dispersive X-ray fluorescence measuring instrument (EDXRF)
coatings, small structures, trace elements and alloys.
Element range:Sodium Na (11) to Uranium U (92) – up to 24 elements simultaneously.
Design:Bench top unit with motorized opening cylindrical vacuum chamber.
External vacuum pump.Helium purge of measurement chamber (optional)
Programmable motorized X/Y/Z sample stage
High resolution color video camera with a wide magnification range.
Measuring direction:Top down
X-ray tube:Micro focus X-ray tube with Rhodium target
(Tungsten, Molybdenum, or other target materials as option)
High voltage:Three steps: 8 kV, 20 kV, 50 kV
Aperture (Collimator):4x changeable: Ø 0.1 mm (3.9 mils), Ø 0.3 mm (11.8 mils),
Ø 1 mm (39.4 mils),Ø 3 mm (118 mils), others on demand
Primary filter:6x changeable: Ni 10 μm (0.39 mils), free, Al 1000 μm (39.4 mils), Al 500 μm
(19.7 mils), Al 100 μm (3.94 mils), Mylar® 100 μm (3.94 mils)
Measurement spot:Depends on measurement distance and used aperture.
Real spot size is displayed on the video screen.
Smallest measurement spot: approx. Ø 0.15 mm (5.9 mils).
X-ray detector:SDD Silicon Drift Detector, peltier-cooled
Resolution (fwhm for Mn-Kα):≤ 140 eV
Measurement distance:0 … 20 mm (0 … 0.8 in), Distance compensation with patented DCM method
for simplified measurements at varying distances. For particular applications
an additional calibration might be necessary.
Video microscope:High-resolution CCD color camera for optical monitoring of the
measurement location along the primary beam axis, manual focusing
and auto-focus, crosshairs with a calibrated scale (ruler) and spot-
indicator,adjustable LED illumination of the measurement, Laser pointer
(class 1) to support accurate sample placement.
Video magnification factor:20x … 180x (optical: 20x … 45x; digital: 1x, 2x, 3x, 4x)
Design:Fast motorized and programmable X/Y/Z sample stage
Travel distance:X-/ Y-/ Z-axis [mm]:100 x 100 x 100, [in]: 3.94 x 3.94 x 3.94
Repeatability precision XY:≤ 0,01 mm (0.39 mils), uni-directional
Support area:Width x depth [mm]: 135 x 135, [in]: 5.31 x 5.31
Max. sample weight:≤ 1 kg (2.2 lb)
Max. sample height:100 mm (3.94 in)
Power supply:AC 115 V or AC 230 V 50 / 60 Hz
Power consumption:Max. 120 W ,without evaluation PC
Protection class:IP40
External dimensions:Width x depth x height [mm]: 640 x 640 x 760 mm, [in]: 25.2 x 25.2 x 29.2
Interior dimensionsDiameter x depth [mm]: 400 x 390, [in]: 15.8 x 15.3
of chamber:
Weight:approx. 182 kg (401 lb)
Operating temperature:10 °C – 40 °C (50 °F – 104 °F) around the housing
Storage temperature:0 °C – 50 °C (32 °F – 122 °F)
Admissible air humidity:≤ 95 %, non-condensing
Computer:Windows®-PC
Software:Standard: Fischer WinFTM® BASIC including PDM®
Optional: Fischer WinFTM® SUPER
CE approval:EN 61010
X-Ray standards:DIN ISO 3497 and ASTM B 568
Approval:Individual acceptance inspection as a fully protected instrument according
to the German regulations „Deutsche Röntgenverordnung-RöV“.
| Dimension | 660 x 835 x 720 mm |
| High Voltage | Three steps 10 kV, 40 kV, 50 kV |
| Protection Class | IP40 |
| X Ray Standards | DIN ISO 3497 and ASTM B 568 |
| Brand | Fischer |
| Usage/Application | Industrial |
| Power Supply | AC 115 V or AC 230 V 50 / 60 HzAC 115 V or AC 230 V 50 / 60 Hz |
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